High speed and high accuracy

  0.5um / 0.05um linear encoders
  12X programmable zoom
  3M digital camera
  Programmable quadrature ring, co-axial and sub-stage illumination
 

MaxV-0804AV: 200x100x175 mm 

MaxV-0606AV: 150x150x150 mm 

MaxV-1206AV: 300x150x150 mm

MaxV-1212AV: 300x300x200 mm

Linescan camera for high speed measurement and inspection

  8160 maximum line pixel
  Color or BW
  High speed scan
  Precision measurement and defect inspection

Generate con-focal image and 3D map. High speed 3D measurement

  High speed 3D area measurement
  MaxV-LS: Linescan metrology and inspection system
  MaxV-3D-SM: 3D confocal metrology system
 

For precision height measurement and 3D profiling

  Triangular or ConoProbe laser. White light sensor
  Measurement accuracy can be better than 0.1 um
  Point, line or area scan
  Height, profile and surface measurement
  Video assist alignment and programming

Very small dimension measurement and analysis

  Zoom optics with choices of objective
  Precision XYZ 3D measurement
  Color or monochrome digital or analog camera.
  Programmable lighting and zoom.
  Rich imaging processing functions

One system for multiple purpose for high efficiency

  High magnification and very large FOV optics combination
  Linescan optics and zoom optics combination
  Dual side optics combination
  3D-SM 3D sensor and zoom optics combination